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General Information
- Application: Wafer fabrication
- CAS Number: 108-65-6
- Grade: ULSI
- Synonyms: Propylene glycol methyl ether acetate
Physical Properties
- Boiling Point/Range: 145 °C (1,013 hPa)
- Color: Colorless
- Density: 0.97 g/cm3 (20 °C)
- Flashpoint: 45 °C
- Melting Point/Range: -66 °C (1,013 hPa)
- Odor: Ether-Like
- Partition Coefficient: 0.43
- pH: No data available
- Physical form: Liquid
- Solubility: Soluble in most organic solvents
- Solubility in Water: 20 °C
- Vapor Pressure: 3.6 hPa (20 °C)
Safety Information
- Chemical Stability: Flammable liquid and vapor
- Corrosivity: Not corrosive to metals
- Flammability: Not applicable
- Ignition Temperature: 333 °C
- Incompatible Materials: Plastic materials can be attacked, Strong oxidizing agents
- Self Ignition: Not auto-flammable
- Thermal Decomposition: At normal pressure may be distilled without decomposition.
