Applications:
SEMICOSIL® products for the semiconductor industry are used as
- Precursors for Si-containing insulating layers including low-k and ultra-low-k applications
- Adhesion promoters for photolithography
- Etching agents for regular post-treatment, without risk of contaminating, e.g. epitaxy chambers
- Components for polishing agents, which mostly serve as mechanical abrasion components in the slurries
Our comprehensive product portfolio covers both front-end and back-end applications.
Industries
- Semiconductor industry (wafer and chip fabrication)
Our products are characterized by their high quality:
- High purity: Our precursors or etching agents can be used in CVD coating chambers directly after filtration and filling.
- Effective purification: Any remaining trace contamination can be easily removed by distillation if the application requires even higher purity.
- Low trace-metal content: Guarantees the quality and safety of our products.
- Minimal interference from dopants, such as boron or germanium, that can have a negative impact on functionality.
