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Reflective Multilayer Materials

Bottom Anti-Reflective Coating (BARC) is placed beneath the photoresist layer to prevent light reflection from the substrate. This helps to suppress standing waves caused by interference within the resist layer during exposure, which can lead to variations in sidewall profiles and critical dimensions. As a result, BARC improves the accuracy of lithography.

This helps to suppress standing waves caused by interference within the resist layer during exposure, which can lead to variations in sidewall profiles and critical dimensions. As a result, BARC improves the accuracy of lithography.

We supply BARC materials that do not contain PFOS and PFOA, which are internationally regulated as persistent organic pollutants.

I-Line Resist Lineup

G-Line Resist

ArF Resist

KrF Resist Lineup

KrF Resist (TDUR-P6159)

KrF Resist (TDUR-P7117)

Roll Coater Resist

Deep Dry Etching Resist

Redistribution Layer (RDL) Resist

Stripping Solution for Thick Films

Developer Solution

Film Formation Materials

Photosensitive Permanent Films

Photosensitive Adhesive Materials

Surface Treatment Technology

Porous Polyimide Film

Super Hydrophilic Coating Materials

Super Hydrophilic Coating Materials With Enhanced Durability

Structure Forming Photosensitive Permanent Film Materials

Micro physiological system Fluid3D-X®

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