Zepto One - Zepto - Atto - Femto - Plasma cleaner system

Femto: Chamber volume: approx. 2 - 3 litres

Housing:   Tabel top / Stand alone
W: 310 - 560 / 600 mm
H: 211 - 860 / 1700 mm
D: 420 - 600 / 800 mm

Generator: • 40 kHz / 0 - 100 W
                  • 100 kHz / 0 - 500 W
                  • 13,56 MHz / 0 - 200 W
                  • 2,45 GHz / 0 - 300 W

Controls:    • Semi-automatic           • Basic PC         • Full PC

Example of use:  • Laboratory / small series           • Production

Vacuum chambers:

• Stainless steel round with cover: Ø 100 mm, D 278 mm
• Stainless steel rectangular with hinged door: B 103 x H 103 x D 285
• Aluminium rectangular with hinged door: B 110 mm x H 120 mm x D 300 mm
• quartz glass (UHP) round with cover / hinged door: Ø 95 mm, D 280 mm
• Borosilicate glass (HP) round with cover / hinged door: Ø 95 mm, D 280 mm