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Options:
| Quick cooling | Heat exchanger with pump, valves, pipes for fast cooling |
| Additional heater | 2 x 15 kW for faster heating |
| Additional thermocouple | 1 x for substrate temperature measurement |
| Additional gas with MFC | He or Ar |
| Piping | Stainless steel instead of copper |
| Magnetic turbo pump and gate valve on chamber top | No maintenance required |
|---|---|
| Control of substrate temperature by thermocouples | Prevents the substrate from overheating |
| Industrial PC, Windows-based, with remote access | Quick troubleshooting |
| Quick cooling by external heat exchanger integrated on same frame (option) | Compact design and faster degassing cycles |
| Big front door and heavy duty design | Easy loading and unloading of up to 700 kg using a forklift |
| Four (4) level racks available with up to 125 kg load each | Load components of different shapes and size |
| Fast heating up to 450° | Reduces cycle times and energy consumption |
| Energy efficient concept with liner shields inside the chamber | Enables easy cleaning |
The basis for optimum adhesion of PVD coatings is a substrate that is free of dust, dirt, oil, fingerprints and other contaminants not only on the surface, but also inside the material. Therefore, some parts must be degassed at up to 400°C before coating. Effective degassing for optimum coating adhesion
- Efficiency increase of the PVD coating process by up to 20%
- Improved coating adhesion and reduced PVD cycle times
- Precise temperature control
- Easy handling and operation
- Energy-efficient system
- Minimal cleaning effort due to easily removable protective shield sheets
