Trang chủ
/ SUCOTEC High-quality CVD coating equipment

More Views

SUCOTEC High-quality CVD coating equipment

The SUCOTEC kila, mega and giga series are the new generation of high-quality CVD systems from Oerlikon Balzers. In use around the world, these systems have proven their outstanding performance, flexibility and reliability for nanolayers, multilayers and newly developed coatings in full production conditions.

Increased productivity
Cost-effective and flexible for future demands
Low maintenance costs and more uptime
Consistently high quality of coatings – batch by batch
Safety you can rely on

Mô tả sản phẩm
Bình luận

Standard Equipment

The coating process in all SUCOTEC CVD systems is carried out at pressures of 40 mbar to 800 mbar abs. and temperatures in the range of 700 °C up to 1040 °C. All specified components are industrially proofed and match with highest expectations.
All heated tubings and valves are insulated with prefabricated materials for best efficiency, avoiding of skin irritation. Typical coatings which can be deposited with the basic configuration: TiN, TiC, TiCN, MT-TiCN

Precursor

Gases: Ar, H₂, N₂, HCI, CH₄, H₂S, CO₂, CO	up to 25 Mass Flow Controller (MFC) possible
Liquids: TiCI₄, CH₃CN	2 Coriolis

Accurate process parameters in SUCOTEC CVD systems enable high-performance coatings. Oerlikon Balzers has engineered coating equipment for more than 70 years and is represented in many countries worldwide, including an excellent service and support network. The former Sucotec AG has supplied market-leading CVD coating equipment and has many years of experience in building these systems. The following features and benefits make a SUCOTEC CVD coating system the right long-term choice:

With a 20% bigger chamber, SUCOTEC CVD systems can coat more tools in less time	Increased productivity
An expandable, modular system enables a high degree of customisation	Cost-effective and flexible for future demands
Easy to maintain	Low maintenance costs and more uptime
Homogeneous coating distribution over entire height	Consistently high quality of coatings – batch by batch
Redundant monitoring of each process step	Safety you can rely on

Options

The extensibility of all SUCOTEC systems allows additional gases and precursors which means they are well prepared for future developments and trends. In general, the SUCOTEC systems are extendable to the following options:

Special coatings*

Requirements

Nano columnar MT-TiCN, TiSiN, TiSiCN	Ar, C₂H₆, C₂H₄, SiCl₄
α-AI₂0₃ , k-AI₂0₃	Aluminium generator (ALGE) for temperatures <350°C
TiAlN and TiAlCN (fcc** or mixed fcc/h with high Al content)	NH₃, Ar, N₂ additional gas inlet, gas heating and gas distribution, ALGE
ZrN, ZrCN, ZrBCN, ZrO₂, HfN, HfCN	Metal chlorinator (MEGE) for temperatures <450°C
Cr₂O₃, CrC_x	Internal chlorinator for temperatures in the range of 700 - 1000°C
TiB₂, TiBN, MT-TiBCN	BCl₃, Ar